The convergence of top-down and bottom-up nanofabrication: formation of 3D structures (Invited Paper)

The convergence of top-down and bottom-up nanofabrication: formation of 3D structures (Invited Paper)

Author(s):

Yang, D. ( Cornell Univ. (USA) )
Dai, J. ( Cornell Univ. (USA) )
Li, M. ( Cornell Univ. (USA) )
Ober, C. K. ( Cornell Univ. (USA) )

Publication title:

Nanofabrication: Technologies, Devices, and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5592

Pub. Year:

2005

Page(from):

12

Page(to):

26

Pages:

15

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455451 [0819455458]

Language:

English

Call no.:

P63600/5592

Type:

Conference Proceedings

Details

TDL ID:	ZA00014798
Series ID:	PA00000029
Conf. info. (Name):	Optics East : Nanofabrication
Conf. info. (Number):	2004
Conf. info. (Venue):	Philadelphia, PA, USA
Conf. info. (Date):	2004.10.25-2004.10.28

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