The effect of deposition parameters on the boron nitride films grown on Si(1OO) by PLD with nanosecond pulses

The effect of deposition parameters on the boron nitride films grown on Si(1OO) by PLD with nanosecond pulses

Author(s):

Luculescu, C. R. ( National Institute for Laser, Plasma, and Radiation Physics (Romania) )
Sato, S. ( Tohoku Univ. (Japan) )
Fenic, C. G. ( National Institute for Laser, Plasma, and Radiation Physics (Romania) )

Publication title:

ROMOPTO 2003, Seventh Conference on Optics, 8-11 September 2003, Constanta, Romania

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5581

Pub. Year:

2004

Page(from):

409

Page(to):

417

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455345 [0819455342]

Language:

English

Call no.:

P63600/5581

Type:

Conference Proceedings

Details

TDL ID:	ZA00014787
Series ID:	PA00000029
Conf. info. (Name):	ROMOPTO - Conference on Optics
Conf. info. (Number):	2003 : 7th
Conf. info. (Venue):	Constanta, Romania
Conf. info. (Date):	2003.09.08-2003.09.11

Similar Items:

1 Conference Proceedings Dependence of the ablative effect of nanosecond laser pulses at the surface of dentine samples on laser wavelength Fenic,C.G., Chis,I., Dabu,R.V., Stratan,A., Apostol,I.G., Stoian,R., Luculescu,C., Chica,C., Nistro,L.C. SPIE-The International Society for Optical Engineering	7 Conference Proceedings CdTe:Ge/Si (100) thin films grown by pulsed laser deposition (PLD) for photonic devices [5970-35] Neretina, S., Hughes, R.A., Preston, J.S., Sochinskii, N.V., Mascher, P. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Laser ablation of YBCO targets and optical-breakdown-assisted PLD for high Tc superconducting thin films deposition Apostol,I., Stoian,R., Luculescu,C., Dabu,R.V., Stratan,A., Udrea,S., Flacau,C. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Ablation threshold and plasma analyses in the PLD process Apostol,I., Stoian,R., Luculescu,C., Dubu,R.V., Stratan,A. SPIE-The International Society for Optical Engineering
3 Conference Proceedings PREFERENTIALLY ORIENTED CUBIC BORON NITRIDE FILMS GROWN ON Si (001) SUBSTRATES BY ION ASSISTED PULSED LASER DEPOSITION Ballal, A.K., Salamanca-Riba, L., Doll, G.L., Taylor II, C.A., Clarke, R. Materials Research Society	9 Conference Proceedings X-RAY ABSORPTION STUDY OF PULSED LASER DEPOSITED BORON NITRIDE FILMS Chailen, A., Terminello, L. J., Wong, J., Doll, G. L., Sato, T. MRS - Materials Research Society
4 Conference Proceedings Improvement of Adhesion of Cubic Boron Nitride Films: Effect of Interlayer and Deposition Parameters He, Q., Li, C., Lu, F., Pilione, L., Messier, R. F. Trans Tech Publications	10 Conference Proceedings The effect of oxygen deposition pressure on the structure and properties of pulsed laser deposited LaxCa1-xMnOdelta films Horwita, J.S., Dorsey, P.C., Koon, N.C., Rubinstein, M., Byers, J.M., Gillespie, D.J., Osofsky, M.S., Harris, V.G., … Materials Research Society
5 Conference Proceedings Thin film synthesis of wurtzite boron nitride by femtosecond pulsed laser deposition T. Shimizu, T. Nakamura, S. Sato SPIE - The International Society of Optical Engineering	11 Conference Proceedings Heteroepitaxial Growth of ZnO Films by PLD Vispute, R. D., Talyansky, V., Trajanovic, Z., Choopun, S., Downes, M., Sharma, R. P., Venkatesan, T., Wood, M. C., … MRS - Materials Research Society
6 Conference Proceedings Pulsed-laser deposition of boron nitride films on silicon R. Schmauder, G. Dodel, G. Bilger Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings NUCLEATION AND GROWTH OF CUBIC BORON NITRIDE FILMS PRODUCED BY ION-ASSISTED PULSED LASER DEPOSITION Friedmann, T. A., Medlin, D. L., Mirkarimi, P. B., McCarty, K. F., Klaus, E. J., Boehme, D. R., Johnsen, H. A., Mills, … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12