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Optical MEMS-based bimorph for thermal sensing

Author(s):
Publication title:
Applications of photonic technology [7A] : closing the gap between theory, development, and application : 7A--Photonics North 2004: Optical components and devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5577
Pub. Year:
2004
Page(from):
628
Page(to):
635
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455260 [0819455261]
Language:
English
Call no.:
P63600/5577-2
Type:
Conference Proceedings

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