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Reduce process bias of photomask manufacturing for next-generation lithography

Author(s):
  • Lee, D. P. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) )
  • Wang, S. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) )
  • Tian, T. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) )
  • Yang, S. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) )
  • Chen, R. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) )
Publication title:
24th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567
Pub. Year:
2004
Page(from):
1152
Page(to):
1160
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
Language:
English
Call no.:
P63600/5567-2
Type:
Conference Proceedings

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