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Fabrication and properties of F-doped silica glasses via sol-gel technique

Author(s):
  • Cheng, K. C. ( Simax Technologies Inc. (USA) )
  • Xu, Y. ( Simax Technologies Inc. (USA) )
  • Sheu, P. ( Simax Technologies Inc. (USA) )
Publication title:
24th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567
Pub. Year:
2004
Page(from):
983
Page(to):
992
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
Language:
English
Call no.:
P63600/5567-2
Type:
Conference Proceedings

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