Blank Cover Image

Maskless lithography with the solid immersion lens nano probes

Author(s):
  • Milster, T. ( Optical Sciences Ctr./Univ. of Arizona (USA) )
  • Chen, T. ( Optical Sciences Ctr./Univ. of Arizona (USA) )
  • Nam, D. ( Samsung Electronics Co., Ltd. (South Korea) )
  • Schlesinger, T. E. ( Carnegie Mellon Univ. (USA) )
Publication title:
24th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567
Pub. Year:
2004
Page(from):
545
Page(to):
556
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
Language:
English
Call no.:
P63600/5567-1
Type:
Conference Proceedings

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