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Quantitative analysis of develop loading effect and its application

Author(s):
Han, H. -S. ( Samsung Electronics Co., Ltd. (South Korea) )
Moon, S. -G. ( Samsung Electronics Co., Ltd. (South Korea) )
Yoon, J. -B. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, B. -G. ( Samsung Electronics Co., Ltd. (South Korea) )
Moon, S. -Y. ( Samsung Electronics Co., Ltd. (South Korea) )
Choi, S. -W. ( Samsung Electronics Co., Ltd. (South Korea) )
Han, W. -S. ( Samsung Electronics Co., Ltd. (South Korea) )
2 more
Publication title:
24th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567
Pub. Year:
2004
Page(from):
213
Page(to):
219
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
Language:
English
Call no.:
P63600/5567-1
Type:
Conference Proceedings

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