Blank Cover Image

Evaluation of a new-generation photomask develop system for CAR

Author(s):
Cantrell, R. ( Advanced Mask Technology Ctr. (Germany) )
Tschinkl, M. ( Advanced Mask Technology Ctr. (Germany) )
Feicke, A. ( Advanced Mask Technology Ctr. (Germany) )
Porsche, W. ( Advanced Mask Technology Ctr. (Germany) )
Lee, G. ( Advanced Mask Technology Ctr. (Germany) )
Kotoda, T. ( Tokyo Electron Deutschland GmbH (Germany) )
Tichy, P. ( Tokyo Electron Deutschland GmbH (Germany) )
Fukai, T. ( Tokyo Electron Ltd. (Japan) )
Kamei, S. ( Tokyo Electron Ltd. (Japan) )
Asai, H. ( Tokyo Electron Ltd. (Japan) )
5 more
Publication title:
24th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567
Pub. Year:
2004
Page(from):
190
Page(to):
200
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
Language:
English
Call no.:
P63600/5567-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings First photomask developer based on state-of-the-art wafer processing technology

Tichy, P., Fukai, T., Kamei, S., Asai, H., Kotoda, T., Takeshita, K., Miyamoto, T., Okamoto, Y., Funakoshi, H., Koga, …

SPIE - The International Society of Optical Engineering
7 Conference Proceedings A photomask defect evaluation system

Yamanaka, E., Kanamitsu, S., Hirano, T., Tanaka, S., Ikeda, T., Ikenaga, O., Kawashima, T., Narukawa, S., Kobayashi, H.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Application of a wafer development process to mask making [5853-22]

Lee, G., Berger, C., Burgel, C., Feicke, A., Cantrell, R., Tschinkl, M.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Advanced e-beam CAR resist evaluation for 65nm generation [5992-112]

Chan, G., Lin, O., Tseng, W., Lee, B., Huang, T., Kozuma, M.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Evaluation of e-beam sensitive CARs for advanced mask making [5853-27]

Feicke, A., Irmscher, M., Schwersenz, A., Tschinkl, M.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Simple method for separating and evaluating origins of a side error in mask CD uniformity: photomask blanks and mask-making processes

Choi, Y.-H., Park, J.R., Sung, M.-G., Yang, S.-H., Kim, S.-H., Lee, H.-J., Lee, J.-Y., Jang, I.Y., Kim, Y.H., Choi, …

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Comparison of new film nozzle with standard nozzle for aqueous puddle developing of photomasks

Buergel, C., Saule, W., Strobl, M., Dress, P., Schwersenz, A., Tschinkl, M.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Advantages of using the CAR for photomask manufacturing

Kondoh,T., Itoh,M., Taniguchi,R., Ohtsubo,K., Sakai,M., Watanabe,H.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings A study of post-exposure baking effect for CAR process in photomask fabrication

Park, D.-I., Seo, S.-K., Jeong, W.-G., Park, E.-S., Lee, J.-H., Kwon, H.-J., Kim, J.-M., Jung, S.-M., Choi, S.-S.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Evaluation of reticle cleaning performance with different drying methods for high-grade photomasks

Jeong,W.G., Lee,S.W., Kim,D.H., Yoon,Y.J., Lee,D.H., Choi,B.Y., Choi,S.-S., Jung,S.M., Jeong,S.-H.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Integration and optimization of the DUV ALTA pattern generation system using a CAR process with the Tetra photomask etch system

Buxbaum, A.H., Fuller, S.E., Montgomery, W., Ungureit, M.E.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Reduce process bias of photomask manufacturing for next-generation lithography

Lee, D. P., Wang, S., Tian, T., Yang, S., Chen, R.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12