Blank Cover Image

Phase defect printability and mask inspection capability of 65-nm technology node Alt-PSM for ArF lithography (Photomask Japan Best Paper)

Author(s):
Akima, S. ( Toppan Printing Co., Ltd. (Japan) )
Komizo, T. ( Toppan Printing Co., Ltd. (Japan) )
Kawakita, S. ( Toppan Printing Co., Ltd. (Japan) )
Kodera, Y. ( Toppan Printing Co., Ltd. (Japan) )
Narita, T. ( Toppan Printing Co., Ltd. (Japan) )
Ishikawa, K. ( Sony Corp. (Japan) )
1 more
Publication title:
24th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567
Pub. date:
2004
Page(from):
23
Page(to):
35
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
Language:
English
Call no.:
P63600/5567-1
Type:
Conference Proceedings

Similar Items:

Nagamura, Y., Maetoko, K., Maeshima, K., Tamada, N., Hosono, K., Fujimoto, M., Kodera, Y., Goto, K., Narita, T., Matsuo, …

SPIE-The International Society for Optical Engineering

Driessen, F.A., Zawadzki, M.T., Krishnan, P.R., Balasinski, A., Vandenberghe, G.

SPIE - The International Society of Optical Engineering

Kim, W.D., Akima, S., Aquino, C.M., Becker, C., Eickhotf, M.D., Narita, T., Quah, S.-K., Rohr, P.M., Schlaffer, R., …

SPIE-The International Society for Optical Engineering

Tateno, M., Takayama, N., Murakami, S., Hatta, K., Akima, S., Matsuo, F., Otaki, M., Kim, B.-G., Tanaka, K., Yoshioka, …

SPIE-The International Society for Optical Engineering

Ohira, K., Kim, B.G., Tanaka, K., Yoshioka, N., Tateno, M., Takayama, N., Murakami, S., Hatta, K., Akima, S., Matsuo, …

SPIE - The International Society of Optical Engineering

Chen,J.X., Riddick,J., Lamantia,M., Zerrade,A., Henderson,P.K., Hughes,G.P., Tabery,C.E., Phan,K.A., Spence,C.A., …

SPIE-The International Society for Optical Engineering

Watanabe, H.

SPIE - The International Society of Optical Engineering

S. Goo, Y. Li

Society of Photo-optical Instrumentation Engineers

Chiba,K., Takahashi,H., Nozaki,W., Akima,S., Nagashige,S., Yamada,Y.

SPIE-The International Society for Optical Engineering

Ozawa, K., Komizo, T., Ohnuma, H.

SPIE-The International Society for Optical Engineering

Lin,S.C., Chen,J.H., Hsu,T.H., Hung,J.C.C., Lin,J.C.H.

SPIE-The International Society for Optical Engineering

Ohba, N., Ishikawa, K., Katsumata, M., Ohnuma, H.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12