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Azimuth calibration method in ellipsometer with imaging spectrograph

Author(s):
Chegal, W. ( Korea Research Institute of Standards and Science (South Korea) )
Cho, Y.J. ( Korea Research Institute of Standards and Science (South Korea) )
Kim, H.J. ( Korea Research Institute of Standards and Science (South Korea) )
Cho, H.M. ( Korea Research Institute of Standards and Science (South Korea) )
Lee, Y.W. ( Korea Research Institute of Standards and Science (South Korea) )
Kim, S.H. ( Korea Advanced Institute of Science and Technology (South Korea) )
1 more
Publication title:
Imaging spectrometry X : 2-4 August 2004, Denver, Colorado, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5546
Pub. Year:
2004
Page(from):
400
Page(to):
405
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454843 [0819454842]
Language:
English
Call no.:
P63600/5546
Type:
Conference Proceedings

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