Mechanical bonding of two identical silicon planar refractive lenses
- Author(s):
- Yunkin, V. ( Institute of Microelectronics Technology (Russia) )
- Grigoriev, M.V. ( Institute of Microelectronics Technology (Russia) )
- Kuznetsov, S. ( Institute of Microelectronics Technology (Russia) )
- Snigirev, A.A. ( European Synchrotron Radiation Facility (France) )
- Snigireva, I.I. ( European Synchrotron Radiation Facility (France) )
- Publication title:
- Design and microfabrication of novel x-ray optics II : 5-6 August 2004, Denver, Colorado, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5539
- Pub. Year:
- 2004
- Page(from):
- 251
- Page(to):
- 258
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819454775 [081945477X]
- Language:
- English
- Call no.:
- P63600/5539
- Type:
- Conference Proceedings
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