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Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)

Author(s):
Braun, S. ( Fraunhofer-Institut fur Werkstoff-und Strahltechnik (Germany) )
Bendjus, B. ( Fraunhofer-Institut fur Zerstorungsfreie Prufverfahren (Germany) )
Foltyn, T. ( Fraunhofer-Institut fur Werkstoff-und Strahltechnik (Germany) )
Menzel, M. ( Fraunhofer-Institut fur Werkstoff-und Strahltechnik (Germany) )
Schreiber, J. ( Fraunhofer-Institut fur Zerstorungsfreie Prufverfahren (Germany) )
Leson, A. ( Fraunhofer-Institut fur Werkstoff-und Strahltechnik (Germany) )
1 more
Publication title:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5533
Pub. Year:
2004
Page(from):
75
Page(to):
84
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454713 [0819454710]
Language:
English
Call no.:
P63600/5533
Type:
Conference Proceedings

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