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Nanostructured diffractive optical elements on SiNx membrane for UV-visible regime applications

Author(s):
Lee, C.C. ( National Central Univ. (Taiwan) )
Wang, C.M. ( National Central Univ. (Taiwan) )
Xu, C.L. ( National Central Univ. (Taiwan) )
Chen, J.Y. ( National Central Univ. (Taiwan) )
Chang, J.Y. ( National Central Univ. (Taiwan) )
Liao, Y.M. ( National Central Univ. (Taiwan) )
Chi, G.C. ( National Central Univ. (Taiwan) )
2 more
Publication title:
Nanoengineering: fabrication, properties, optics, and devices : 4-6 August, 2004, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5515
Pub. date:
2004
Page(from):
170
Page(to):
179
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454539 [0819454532]
Language:
English
Call no.:
P63600/5515
Type:
Conference Proceedings

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