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Fundamental noise in MEMS force sensors (Invited Paper)

Author(s):
Kenny, T. W. ( Stanford Univ. (USA) )
Liang, Y. ( Stanford Univ. (USA) )
Pruitt, B. L. ( Stanford Univ. (USA) )
Harley, J. A. ( Stanford Univ. (USA) )
Bartsch, M. ( Stanford Univ. (USA) )
Rudnitsky, R. ( Stanford Univ. (USA) )
1 more
Publication title:
Noise and Information in Nanoelectronics, Sensors, and Standards II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5472
Pub. date:
2004
Page(from):
143
Page(to):
151
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453945 [0819453943]
Language:
English
Call no.:
P63600/5472
Type:
Conference Proceedings

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