An optical workstation for characterization and modification of MEMS
- Author(s):
Hedley, J. ( Univ. of Newcastle upon Tyne (United Kingdom) ) Burdess, J. S. ( Univ. of Newcastle upon Tyne (United Kingdom) ) Harris, A. J. ( Univ. of Newcastle upon Tyne (United Kingdom) ) Gallacher, B. J. ( Univ. of Newcastle upon Tyne (United Kingdom) ) McNeil, C. J. ( Univ. of Newcastle upon Tyne (United Kingdom) ) Cumpson, P. J. ( National Physical Lab. (United Kingdom) ) Enderling, S. ( Univ. of Edinburgh (United Kingdom) ) - Publication title:
- Optical Micro- and Nanometrology in Manufacturing Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5458
- Pub. Year:
- 2004
- Page(from):
- 244
- Page(to):
- 252
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453808 [0819453803]
- Language:
- English
- Call no.:
- P63600/5458
- Type:
- Conference Proceedings
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