Hybrid analysis of micromachined silicon thin film based on digital microscopic holography

Hybrid analysis of micromachined silicon thin film based on digital microscopic holography

Author(s):

Xu, L. ( Nanyang Technological Univ. (Singapore) )
Peng, X. ( Nanyang Technological Univ. (Singapore) )
Miao, J. ( Nanyang Technological Univ. (Singapore) )
Asundi, A. K. ( Nanyang Technological Univ. (Singapore) )

Publication title:

Optical Micro- and Nanometrology in Manufacturing Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5458

Pub. Year:

2004

Page(from):

236

Page(to):

243

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453808 [0819453803]

Language:

English

Call no.:

P63600/5458

Type:

Conference Proceedings

Details

TDL ID:	ZA00014649
Series ID:	PA00000029
Conf. info. (Name):	Photonics Europe : Optical micro- and nanometrology in manufacturing technology
Conf. info. (Number):	2004
Conf. info. (Venue):	Strasbourg, France
Conf. info. (Date):	2004.04.29-2004.04.30

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