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Analysis of static and dynamic operational behavior of active micromembranes

Author(s):
  • Aswendt, P. ( Fraunhofer-Institut fur Werkzeugmaschinen und Umformtechnik (Germany) )
  • Dean, T. ( Thales Research and Technology (France) )
Publication title:
Optical Micro- and Nanometrology in Manufacturing Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5458
Pub. Year:
2004
Page(from):
25
Page(to):
33
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453808 [0819453803]
Language:
English
Call no.:
P63600/5458
Type:
Conference Proceedings

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