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Light-scattered measurements using Fourier optics: a new tool for surface characterization

Author(s):
Publication title:
Optical Metrology in Production Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5457
Pub. Year:
2004
Page(from):
344
Page(to):
354
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453792 [081945379X]
Language:
English
Call no.:
P63600/5457
Type:
Conference Proceedings

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