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Fabrication of micro-optical switch by post-CMOS micromachining process

Author(s):
Cheng, Y. C. ( National Taiwan Univ. (Taiwan) )
Lee, C. Y. ( National Taiwan Univ. (Taiwan) )
Dai, C. L. ( National Chung Hsing Univ. (Taiwan) )
Chen, W. J. ( National Taiwan Univ. (Taiwan) )
Chang, P. Z. ( National Taiwan Univ. (Taiwan) )
Chen, P. H. ( National Taiwan Univ. (Taiwan) )
1 more
Publication title:
MEMS, MOEMS, and Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5455
Pub. Year:
2004
Page(from):
274
Page(to):
283
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
Language:
English
Call no.:
P63600/5455
Type:
Conference Proceedings

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