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MEMS tunable filter for telecom applications

Author(s):
Overstolz, T. ( Univ. de Neuchatel (Switzerland) )
Niederer, G. ( Univ. de Neuchatel (Switzerland) )
Noell, W. ( Univ. de Neuchatel (Switzerland) )
Gale, M. T. ( Ctr. Suisse d'Electronique et de Microtechnique S.A. (Switzerland) )
Herzig, H. P. ( Univ. de Neuchatel (Switzerland) )
Obi, S. ( Ctr. Suisse d'Electronique et de Microtechnique S.A. (Switzerland) )
Thiele, H. ( Ctr. Suisse d'Electronique et de Microtechnique S.A. (Switzerland) )
de Rooij, N. F. ( Univ. de Neuchatel (Switzerland) )
3 more
Publication title:
MEMS, MOEMS, and Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5455
Pub. Year:
2004
Page(from):
240
Page(to):
251
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
Language:
English
Call no.:
P63600/5455
Type:
Conference Proceedings

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