Blank Cover Image

A surface-micromachined tunable film bulk acoustic resonator

Author(s):
Publication title:
MEMS, MOEMS, and Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5455
Pub. Year:
2004
Page(from):
166
Page(to):
173
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
Language:
English
Call no.:
P63600/5455
Type:
Conference Proceedings

Similar Items:

Rottenberg, X., Nauwelaers, B., Raedt, W.De, Tilmans, H.A.C.

SPIE - The International Society of Optical Engineering

Alcantara, G. P., Balashov, S. M., Carola, A., Kim, C.-U.

Electrochemical Society

Frederick, A. A., Hu, H.-H., Clark, W. W.

SPIE - The International Society of Optical Engineering

Cho, J. -H., Yun, T. -S., Baek, T. -J., Ko, B. -S., Shin, D. -H., Lee, J. -C.

SPIE - The International Society of Optical Engineering

Pfeiffer,J., Peerlings,J., Riemenschneider,R., Genovese,R., Aziz,M., Bdhm,G., Amann,M.C., Meissner,P.M., Hartnagel,H.L.

SPIE - The International Society for Optical Engineering

Carchon, G., Vaesen, K., Brebels, S., Raedt, W. De, Beyne, E., Loock, P. Van, Nauwelaers, B.

IMAPS

Kim, S.G., Jung, S.B., Oh, J.H., Kim, H.J., Shin, Y.H.

Trans Tech Publications

Kobrin,P.H., Seabury,C., Linnen,C., Harker,A.B., Chung,R., McGill,R.A., Matthews,P.J.

SPIE-The International Society for Optical Engineering

Cowan,W.D., Bright,V.M., Dalton,G.C.

SPIE-The International Society for Optical Engineering

Hou, M.T.-K., Liao, K.-M., Yeh, H.-Z., Cheng, B.-W., Hong, P.-Y., Chen, R.

SPIE-The International Society for Optical Engineering

C.K. Young, G.T. Andrews, M.J. Clouter, Y. Ke, W.J. Choyke, R.P. Devaty

Trans Tech Publications

Linnen,C., Kobrin,P.H., Seabury,C., Harker,A.B., McCill,R.A., Houser,E.J., Chung,R., Weber,R., Swager,T.M.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12