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Fabrication of diffractive optical elements with grayscale photo-lithography

Author(s):
Kim, W. -C. ( Yonsei Univ (South Korea) )
Lee, M. ( Samsung Advanced Institute of Technology (South Korea) )
Sohn, J. ( Samsung Advanced Institute of Technology (South Korea) )
Cho, E. ( Samsung Advanced Institute of Technology (South Korea) )
Yoon, C. ( Yonsei Univ. (South Korea) )
Park, N. ( Yonsei Univ. (South Korea) )
Park, Y. ( Yonsei Univ. (South Korea) )
2 more
Publication title:
Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5380
Pub. date:
2004
Page(from):
686
Page(to):
696
Pages:
11
Pub. info.:
Bellingham: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452931 [0819452939]
Language:
English
Call no.:
P63600/5380
Type:
Conference Proceedings

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