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Recent progress in electron beam mastering for 100Gb/in2 and beyond (Invited Paper)

Author(s):
Furuki, M. ( Sony Corp. (Japan) )
Takeda, M. ( Sony Corp. (Japan) )
Yamamoto, M. ( Sony Corp. (Japan) )
Saito, K. ( Sony Corp. (Japan) )
Shinoda, M. ( Sony Corp. (Japan) )
Fujiki, T. ( Sony Corp. (Japan) )
Aki, Y. ( Sony Corp. (Japan) )
Koizumi, M. ( JEOL Ltd. (Japan) )
Miyokawa, T. ( JEOL Ltd. (Japan) )
Muto, M. ( JEOL Ltd. (Japan) )
5 more
Publication title:
Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5380
Pub. Year:
2004
Page(from):
47
Page(to):
55
Pages:
9
Pub. info.:
Bellingham: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452931 [0819452939]
Language:
English
Call no.:
P63600/5380
Type:
Conference Proceedings

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