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Optimizing an EUV source for 13.5 nm

Author(s):
O'Sullivan, G. D. ( Univ. College Dublin (Ireland) )
Cummings, A. ( Univ. College Dublin (Ireland) )
Duffy, G. ( Univ. College Dublin (Ireland) )
Dunne, P. A. ( Univ. College Dublin (Ireland) )
Fitzpatrick, A. ( Univ. College Dublin (Ireland) )
Hayden, P. ( Univ. College Dublin (Ireland) )
McKinney, L. ( Univ. College Dublin (Ireland) )
Murphy, N. ( Univ. College Dublin (Ireland) )
O'Reilly, D. ( Univ. College Dublin (Ireland) )
Sokell, E. J. ( Univ. College Dublin (Ireland) )
White, J. ( Univ. College Dublin (Ireland) )
6 more
Publication title:
Laser-generated and other laboratory X-ray and EUV sources, optics, and applications : 4-6 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5196
Pub. Year:
2004
Page(from):
273
Page(to):
281
Pages:
9
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450692 [0819450693]
Language:
English
Call no.:
P63600/5196
Type:
Conference Proceedings

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