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Testing microcomponents by speckle interferometry

Author(s):
  • Aswendt, P. ( Fraunhofer Institute fur Werkzeugmaschinen und Umformtechnik (Germany) )
  • Hofling, R. ( Fraunhofer Institute fur Werkzeugmaschinen und Umformtechnik (Germany) )
  • Hiller, K. ( Chemnitz Univ. of Technology (Germany) )
Publication title:
Microsystems Metrology and Inspection
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3825
Pub. Year:
1999
Page(from):
165
Page(to):
173
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819433114 [081943311X]
Language:
English
Call no.:
P63600/3825
Type:
Conference Proceedings

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