Testing microcomponents by speckle interferometry
- Author(s):
- Aswendt, P. ( Fraunhofer Institute fur Werkzeugmaschinen und Umformtechnik (Germany) )
- Hofling, R. ( Fraunhofer Institute fur Werkzeugmaschinen und Umformtechnik (Germany) )
- Hiller, K. ( Chemnitz Univ. of Technology (Germany) )
- Publication title:
- Microsystems Metrology and Inspection
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3825
- Pub. Year:
- 1999
- Page(from):
- 165
- Page(to):
- 173
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819433114 [081943311X]
- Language:
- English
- Call no.:
- P63600/3825
- Type:
- Conference Proceedings
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