Evaluation of the impact of pattern fidelity on photomask inspectability
- Author(s):
- Woolverton, K. S. ( Intel Corp. (USA) )
- Liu, C. ( Intel Corp. (USA) )
- Zwigl, P. ( Intel Corp. (USA) )
- Ruch, W. ( KLA-Tencor Corp. (USA) )
- Publication title:
- Photomask and X-Ray Mask Technology VI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3748
- Pub. Year:
- 1999
- Page(from):
- 520
- Page(to):
- 527
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432308 [081943230X]
- Language:
- English
- Call no.:
- P63600/3748
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Pattern fidelity enhancement with OPC pattern generation on laser lithography [6283-12]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Evaluating diffraction based overlay metrology for double patterning technologies
Society of Photo-optical Instrumentation Engineers |
3
Conference Proceedings
Pattern fidelity improvement by considering the underlying patterns at defocus
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Optimizing defect inspection strategy through the use of design-aware database control layers
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
11
Conference Proceedings
Fidelity comparison of island patterns with different types of illuminations and phase shift masks
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |