Blank Cover Image

Three x-ray mask-making methods applied for LIGA process

Author(s):
Publication title:
Photomask and X-Ray Mask Technology VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3748
Pub. Year:
1999
Page(from):
495
Page(to):
503
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819432308 [081943230X]
Language:
English
Call no.:
P63600/3748
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Realization of multifiber ferrale mold inserts fabricated by the LIGA process

Shyu,R.F., Yang,H., Chou,M.-C.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Electroplating for LIGA Processing

Bonivert, W.D., Hruby, J.M., Hachman, J.T., Kahn Malek, C., Jackson, K. H., Brennan, R.A., Hecht, M.H., Wiberg, D.

Electrochemical Society
2 Conference Proceedings Simple method for separating and evaluating origins of a side error in mask CD uniformity: photomask blanks and mask-making processes

Choi, Y.-H., Park, J.R., Sung, M.-G., Yang, S.-H., Kim, S.-H., Lee, H.-J., Lee, J.-Y., Jang, I.Y., Kim, Y.H., Choi, …

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Characterization of embedded root method in UV-LIGA process

Ho, C.-H., Hsu, W.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings PMMA microstructure as KrF excimer-laser LIGA material

Yang,C.R., Chou,B.C.S., Chou,E.H.Y., Lin,F.H.H., Kuo,W.K., Luo,R.K.S., Chang,J.W., Wei,Z.J.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Comparison study of mask error effects for various mask-making processes

Eom,T.-S., Hur,I.-B., Koo,Y.-M., Baik,K.-H., Choi,I.-H., Kim,D.Y., Shin,C.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Optimization of Au mask fabrication processes for LIGA applications

Shan, X.C., Maeda, R., Ikehara, T., Mekaru, H., Hattori, T.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Applications of LIGA on Micro-Punching Process for Metallic Materials

Pan, C.T., Cheng, P.J., Shen, S.C., Chen, M.F., Wang, R.Y., Chou, M.C., Wu, T.C.

Trans Tech Publications
5 Conference Proceedings A novel fabrication method of needle array combined x-ray gray mask with LIGA process

H. Mekaru, T. Takano, K. Awazu, M. Takahashi, R. Maeda

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Resolution enhancement with thin Cr for chrome mask making

Cha,B.C., Choi,S.W., Kim,J.M., Cho,H.J., Sohn,J.M.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Development of mask-making process for CLM manufacturing technology

Park, J.-H., Chung, D.-H., Lee, M.-K., Shin, I.-K., Choi, S.-W., Yoon, H.-S., Sohn, J.-M., Chen, J.F., Van Den Broeke, …

SPIE-The International Society for Optical Engineering
12 Conference Proceedings The investigation of 193nm CPL 3D topology mask effect on wafer process performance [6154-87]

Cheng, Y. F., Chou, Y. L., Yang, C. H.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12