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Evaluation of an advanced mask-writing system

Author(s):
Kubo, S. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Hiruta, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Sugiyama, M. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Iwamatsu, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Fujisawa, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Morimoto, H. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
1 more
Publication title:
Photomask and X-Ray Mask Technology VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3748
Pub. date:
1999
Page(from):
426
Page(to):
435
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819432308 [081943230X]
Language:
English
Call no.:
P63600/3748
Type:
Conference Proceedings

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