Advanced electron-beam writing system EX-11 for next-generation mask fabrication

Author(s):

Tojo, T. ( Toshiba Corp. (Japan) )

Yoshikawa, R. ( Toshiba Corp. (Japan) )

Ogawa, Y. ( Toshiba Corp. (Japan) )

Tamamushi, S. ( Toshiba Corp. (Japan) )

Hattori, Y. ( Toshiba Corp. (Japan) )

Koikari, S. ( Toshiba Corp. (Japan) )

Kusakabe, H. ( Toshiba Corp. (Japan) )

Abe, T. ( Toshiba Corp. (Japan) )

Ogasawara, M. ( Toshiba Corp. (Japan) )

Akeno, K. ( Toshiba Corp. (Japan) )

Anze, H. ( Toshiba Corp. (Japan) )

Hattori, K. ( Toshiba Corp. (Japan) )

Hirano, R. ( Toshiba Corp. (Japan) )

Yoshitake, S. ( Toshiba Corp. (Japan) )

Iijima, T. ( Toshiba Corp. (Japan) )

Ohtoshi, K. ( Toshiba Corp. (Japan) )

Matsuki, K. ( Toshiba Corp. (Japan) )

Shimomura, N. ( Toshiba Corp. (Japan) )

Yamada, N. ( Toshiba Corp. (Japan) )

Higurashi, H. ( Toshiba Corp. (Japan) )

Nakayamada, N. ( Toshiba Corp. (Japan) )

Fukudome, Y. ( Toshiba Corp. (Japan) )

Hara, S. ( Toshiba Corp. (Japan) )

Murakami, E. ( Toshiba Corp. (Japan) )

Kamikubo, T. ( Toshiba Corp. (Japan) )

Suzuki, Y. ( Toshiba Corp. (Japan) ) , ( Toshiba Machine Co., Ltd. (Japan) )

Oogi, S. ( Toshiba Corp. (Japan) )

Shimizu, M. ( Toshiba Corp. (Japan) )

Nishimura, S. ( Toshiba Corp. (Japan) )

Tsurumaki, H. ( Toshiba Corp. (Japan) )

Yasuda, S. ( Toshiba Corp. (Japan) )

Ooki, K. ( Toshiba Corp. (Japan) )

Koyama, K. ( Toshiba Corp. (Japan) )

Watanabe, S. ( Toshiba Corp. (Japan) )

Yano, M. ( Toshiba Corp. (Japan) )

Suzuki, H. ( Toshiba Corp. (Japan) )

Hoshino, H. ( Toshiba Machine Co., Ltd. (Japan) )

Toriumi, M. ( Toshiba Machine Co., Ltd. (Japan) )

Watanabe, O. ( Toshiba Machine Co., Ltd. (Japan) )

Tsuji, K. ( Toshiba Machine Co., Ltd. (Japan) )

Katayama, M. ( Toshiba Machine Co., Ltd. (Japan) )

Tsuchiya, S. ( Toshiba Machine Co., Ltd. (Japan) )

Suzuki, K. ( Toshiba Machine Co., Ltd. (Japan) )

Kurasawa, S. ( Toshiba Machine Co., Ltd. (Japan) )

Okuzono, K. ( Toshiba Machine Co., Ltd. (Japan) )

Yamada, H. ( Toshiba Machine Co., Ltd. (Japan) )

Handa, K. ( Toshiba Machine Co., Ltd. (Japan) )

Akiyama, T. ( Toshiba Machine Co., Ltd. (Japan) )

Tada, Y. ( Toshiba Machine Co., Ltd. (Japan) )

Noma, A. ( Toshiba Machine Co., Ltd. (Japan) )

Takigawa, T. ( Toshiba Corp. (Japan) )

46 more

Publication title:

Photomask and X-Ray Mask Technology VI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3748

Pub. Year:

1999

Page(from):

416

Page(to):

425

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819432308 [081943230X]

Language:

English

Call no.:

P63600/3748

Type:

Conference Proceedings