Resist outgassing as a function of differing photoadditives

Resist outgassing as a function of differing photoadditives

Author(s):

Houlihan, F. M. ( Lucent Technologies/Bell Labs. )

Rushkin, I. L. ( Lucent Technologies/Bell Labs. )

Hutton, R. S. ( Lucent Technologies/Bell Labs. )

Timko, A. G. ( Lucent Technologies/Bell Labs. )

Nalamasu, O. ( Lucent Technologies/Bell Labs. )

Reichmanis, E. ( Lucent Technologies/Bell Labs. )

Gabor, A. H. ( Arch Chemlcals, Inc. )

Medina, A. N. ( Arch Chemlcals, Inc. )

Malik, S. ( Arch Chemlcals, Inc. )

Neiser, M. ( Arch Chemlcals, Inc. )

Kunz, R. R. ( MIT Lincoln Lab. )

Downs, D. K. ( MIT Lincoln Lab. )

7 more

Publication title:

Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3678

Pub. Year:

1999

Page(from):

264

Page(to):

274

Pages:

11

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819431523 [0819431524]

Language:

English

Call no.:

P63600/3678-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00014620
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Microlithography
Conf. info. (Number):	1999 : 16th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.03.15-1999.03.17

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