High-resolution 248-nm bilayer resist

High-resolution 248-nm bilayer resist

Author(s):

Lin, Q. ( IBM Thomas J. Watson Research Ctr. )

Petrillo, K. E. ( IBM Thomas J. Watson Research Ctr. )

Babich, K. ( IBM Thomas J. Watson Research Ctr. )

Tulipe, D. C. La ( IBM Thomas J. Watson Research Ctr. )

Medeiros, D. ( IBM Thomas J. Watson Research Ctr. )

Mahorowala, A. ( IBM Thomas J. Watson Research Ctr. )

Simons, J. P. ( IBM Thomas J. Watson Research Ctr. )

Angelopoulos, M. ( IBM Thomas J. Watson Research Ctr. )

Wallraff, G. M. ( IBM Almaden Research Ctr. )

Larson, C. E. ( IBM Almaden Research Ctr. )

Fenzel-Alexander, D. ( IBM Almaden Research Ctr. )

Sooriyakumaran, R. ( IBM Almaden Research Ctr. )

Breyta, G. ( IBM Almaden Research Ctr. )

Brock, P. J. ( IBM Almaden Research Ctr. )

DiPietro, R. A. ( IBM Almaden Research Ctr. )

Hofer, D. C. ( IBM Almaden Research Ctr. )

11 more

Publication title:

Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3678

Pub. Year:

1999

Page(from):

241

Page(to):

250

Pages:

10

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819431523 [0819431524]

Language:

English

Call no.:

P63600/3678-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00014620
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Microlithography
Conf. info. (Number):	1999 : 16th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.03.15-1999.03.17

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