Novel silicon-containing resists for EUV and 193-nm lithography
- Author(s):
Kessel, C. R. ( 3M Co. ) Boardman, L. D. ( 3M Co. ) Rhyner, S. J. ( 3M Co. ) Cobb, J. L. ( Motorola ) Henderson, C. C. ( Sandia National Labs. ) Rao, V. ( Intel Corp. ) Okoroanyanwu, U. ( Advanced Micro Devices, Inc. ) - Publication title:
- Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3678
- Pub. Year:
- 1999
- Page(from):
- 214
- Page(to):
- 220
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431523 [0819431524]
- Language:
- English
- Call no.:
- P63600/3678-1
- Type:
- Conference Proceedings
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