Dual-layer inorganic SiON bottom ARC for 0.25-μm DUV hard mask applications
- Author(s):
- Lin, Q. Y. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Cheng, A. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Sudijono, J. L. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Lin, C. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Publication title:
- Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3678
- Pub. Year:
- 1999
- Page(from):
- 186
- Page(to):
- 197
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431523 [0819431524]
- Language:
- English
- Call no.:
- P63600/3678-1
- Type:
- Conference Proceedings
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