Blank Cover Image

Electrical property study of line-edge roughness in top surface imaging process by silylation

Author(s):
Kim, M. -S. ( Hyundai Electronics Industries Co., Ltd. (Korea) )
Kim, H. -G. ( Hyundai Electronics Industries Co., Ltd. (Korea) )
Pyi, S. -H. ( Hyundai Electronics Industries Co., Ltd. (Korea) )
Kim, H. -S. ( Hyundai Electronics Industries Co., Ltd. (Korea) )
Baik, K. -H. ( Hyundai Electronics Industries Co., Ltd. (Korea) )
Choi, I. -H. ( Hyundai Electronics Industries Co., Ltd. (Korea) )
1 more
Publication title:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3678
Pub. Year:
1999
Page(from):
149
Page(to):
159
Pages:
11
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819431523 [0819431524]
Language:
English
Call no.:
P63600/3678-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Tailoring of isolation structures with top-surface imaging process by silylation

Kim,H.-G., Kim,M.-S., Bok,C.-K., Park,B.-J., Kim,J.-W., Baik,K.-H., Lee,D.-H.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Improvement of line edge roughness by employing new PAG

Kim, Y.-S., Kim, Y.-H., Lee, S.-H., Yim, Y.-G., Kim, D,-B., Kim, J.-H.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Top-surface imaging through silylation

Postnikov,S.V., Somervell,M.H., Henderson,C.L., Katz,S., Willson,C.G., Byers,J.D., Qin,A., Lin,Q.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Effect of line-edge roughness (LER) and line-width roughness (LWR) on sub-100-nm device performance

Lee, J.-Y., Shin, J., Kim, H.-W., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Practical implementation of top-surface imaging process by silylation to sub-0.20-ｦﾌm lithography

Park,B.J., Baik,K.H., Kim,H.K., Kim,J.W., Bok,C.K., Vertommen,J., Rosenlund,R.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Comparison study of mask error effects for various mask-making processes

Eom,T.-S., Hur,I.-B., Koo,Y.-M., Baik,K.-H., Choi,I.-H., Kim,D.Y., Shin,C.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Using alicyclic polymers in top surface imaging systems to reduce line-edge roughness

Somervell,M.H., Fryer,D.S., Osborn,B., Patterson,K., Cho,S., Byers,J.D., Willson,C.G.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Characterization of line edge roughness using CD-SAXS [6152-23]

Jones, R.J., Wu, W., Wang, C., Lin, E. K., Choi, K., Rice, B. J., Thompson, G. M., Weigand, S. J., Keane, D. T

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Non-chemically amplified 193-nm top surface imaging photoresist development: polymer substituent and polydispersity effects

Kim, M. -S., Kim, H. -G., Kim, H. -S., Baik, K. -H., Johnson, D. W., Cernigliaro, G. J., Minsek, D. W.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings "Novel chemically amplified positive resist containing acetal-type crosslinker of poly(3,3'-dimethoxypropene) for 193-nm top surface imaging process"

Koh,C.-W., Jung,J.-C., Kim,M.-S., Kong,K.-K., Lee,G., Jung,M.-H., Kim,J.-S., Shin,K.-S.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Liquid-phase silylation characterization of Shipley SPR500A-series resists using PRIME top-surface imaging process

Arshak, K.I., Mihov, M., Arshak, A., McDonagh, D., Sutton, D., Newcomb, S., Kinsella, I.J.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Feasibility study of using line tracer robot under disaster situation

H. K. Kim, G. S. Choi, G. H. Choi

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12