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Uncertainties in the measurement of gauge blocks by interferometry

Author(s):
  • Lan, Y. ( Industrial Technology Research institute (Taiwan) )
  • Chang, W. ( Industrial Technology Research institute (Taiwan) )
Publication title:
Recent Developments in Optical Gauge Block Metrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3477
Pub. Year:
1998
Page(from):
252
Page(to):
261
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819429322 [0819429325]
Language:
English
Call no.:
P63600/3477
Type:
Conference Proceedings

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