Confocal Optoelectronic Holography Microscope for Materials and Structural Characterization of MEMS
- Author(s):
- Publication title:
- Spatially resolved characterization of local phenomena in materials and nanostructures : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 738
- Pub. Year:
- 2003
- Page(from):
- 109
- Page(to):
- 228
- Pages:
- 126
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996755 [1558996753]
- Language:
- English
- Call no.:
- M23500/738
- Type:
- Conference Proceedings
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