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TEM and PL Study of FeSi2 Precipitates Formed in Si by Iron Implantation Using a Metal Vapor Vacuum Arc Ion Source

Author(s):
Publication title:
Quantum confined semiconductor nanostructures : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
737
Pub. date:
2003
Page(from):
697
Page(to):
1404
Pages:
714
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996748 [1558996745]
Language:
English
Call no.:
M23500/737
Type:
Conference Proceedings

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