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Dry Etching Techniques of Amorphous Silicon for Suspended Metal Membrane RF MEMS Capacitors

Author(s):
Publication title:
BioMEMS and bionanotechnology : symposium held April 1-3, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
729
Pub. date:
2002
Page(from):
69
Page(to):
152
Pages:
92
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996656 [1558996656]
Language:
English
Call no.:
M23500/729
Type:
Conference Proceedings

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