Influence Of Oxygen Addition And Substrate Temperature On Textured Growth Of Al Doped Zno Thin Films Prepared By RF Magnetron Sputtering

Influence Of Oxygen Addition And Substrate Temperature On Textured Growth Of Al Doped Zno Thin Films Prepared By RF Magnetron Sputtering

Author(s):

Publication title:

Magnetic and electronic films : microstructure, texture and application to data storage : symposium held April 1-4, 2002, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

721

Pub. Year:

2002

Page(from):

171

Page(to):

178

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996571 [1558996575]

Language:

English

Call no.:

M23500/721

Type:

Conference Proceedings

Details

TDL ID:	ZA00014594
Series ID:	PA00000011
Conf. info. (Name):	Symposium on magnetic and electronic films
Conf. info. (Number):	2002
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2002.04.01-2002.04.04

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