Pulsed Force-Scanning Spreading Resistance Microscopy (PF-SSRM) For High Spatial Resolution 2D-Dopant Profiling

Pulsed Force-Scanning Spreading Resistance Microscopy (PF-SSRM) For High Spatial Resolution 2D-Dopant Profiling

Author(s):

Publication title:

Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

717

Pub. Year:

2002

Page(from):

297

Page(to):

302

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996533 [1558996532]

Language:

English

Call no.:

M23500/717

Type:

Conference Proceedings

Details

TDL ID:	ZA00014590
Series ID:	PA00000011
Conf. info. (Name):	Symposium on silicon front-end junction formation technologies
Conf. info. (Number):	2002
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2002.04.02-2002.04.04

Similar Items:

1 Conference Proceedings Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy Duhayon, N., Clarysse, T., Alvarez, D., Eyben, P., Fouchier, M., Vandervorst, W.J., Hellemans, L. Electrochemical Society	7 Conference Proceedings SSRM And SCM Observation Of Enhanced Lateral As- and BF2-Diffusion Induced By Nitride Spacers Eyben, P., Duhayon, N., Stuer, C., De Wolf, T., Rooyackers, R., Clarysse, T., Vandervorst, W., Badenes, V. Materials Research Society
2 Conference Proceedings Two Dimensional Carrier Profiling Using Scanning Capacitance Microscopy Duhayon, N., Clarysse, T., Alvarez, D., Eyben, P., Fouchier, M., Vandervorst, W., Hellemans, L. SPIE-The International Society for Optical Engineering	8 Conference Proceedings SSRM and SCM Observation of Modified Lateral Diffusion of As, BF2 and Sb Induced by Nitride Spacers Eyben, P., Duhayon, N., Stuer, C., Wolf, I. De, Rooyackers, R., Clarysse, T., Vandervorst, W., Badenes, G. Materials Research Society
3 Conference Proceedings Analysis and Optimization of New Implantation and Activation Mechanisms in Ultra Shallow Junction Implants Using Scanning Spreading Resistance Microscopy (SSRM) Pierre Eyben, Simone Severi, Ray Duffy, Bartek J. Pawlak, Emmanuel Augendre, Wilfried Vandervorst Materials Research Society	9 Conference Proceedings Quantitative Two-Dimensional Carrier Mapping in Silicon Nanowire-Based Tunnel-Field Effect Transistors Using Scanning Spreading Resistance Microscopy Andreas Schulze, Thomas Hantschel, Pierre Eyben, Anne Vandooren, Rita Rooyackers, Jay Mody, Anne S. Verhulst, Wilfried … Materials Research Society
4 Conference Proceedings 2D-TCAD Process Calibration for a High Speed QSA SiGe:C HBT Verified with SSRM A. Sibaja-Hernandez, P. Eyben, S. van Huylenbroeck, D. Vanhaeren, W. Vandervorst Electrochemical Society	10 Conference Proceedings Demonstration of high spatial resolution in ultrafast scanning tunneling microscopy (Invited Paper) Yarotski, D.A., Donati, G.P., Taylor, A.J. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping Fouchier, M., Eyben, P., Alvarez, D., Duhayon, N., Xu, M.W., Brongersma, S., Lisoni, J., Vandervorst, W. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Employing Scanning Spreading Resistance Microscopy (SSRM) for Improving TCAD Simulation Accuracy of Silicon Carbide R. Elpelt, B. Zippelius, S. Doering, U. Winkler Trans Tech Publications
6 Conference Proceedings Scanning Spreading Resistance Microscopy for 3D-Carrier Profiling in FinFET-Based Structures Jay Mody, Pierre Eyben, Wouter Polspoel, Malgorzata Jurczak, Wilfried Vandervorst Materials Research Society	12 Conference Proceedings Increasing The Lateral Resolution Of Scanning Spreading Resistance Microscopy Kline, R. Joe, Richards, John F., Russell, Phillip E. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12