Self-interstitials and substitutional C in silicon: Interstitial- trapping and C- clustering

Self-interstitials and substitutional C in silicon: Interstitial- trapping and C- clustering

Author(s):

Mirabella, S.

Publication title:

Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

717

Pub. Year:

2002

Page(from):

219

Page(to):

224

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996533 [1558996532]

Language:

English

Call no.:

M23500/717

Type:

Conference Proceedings

Details

TDL ID:	ZA00014590
Series ID:	PA00000011
Conf. info. (Name):	Symposium on silicon front-end junction formation technologies
Conf. info. (Number):	2002
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2002.04.02-2002.04.04

Similar Items:

1 Conference Proceedings Complete Suppression Of The Transient Enhanced Diffusion Of B Implanted In Preamorphized Silicon By Interstitial Trapping In A Spatially Separated C-Rich Layer Napolitani, E., Coati, A., Salvador, D. De, Carnera, A., Mirabella, S., Scalese, S., Priolo, F. Materials Research Society	7 Conference Proceedings Thermal Stability and Substitutional Carbon Incorporation Far Above Soid-Solubility in Si1-xCx and Si1-x-yGexCy Layers Grown by Chemical Vaper Deposition Using … Carroll, M.S., Sturm, J.C., Napolitani, E., Salvador, D. De Materials Research Society
2 Conference Proceedings Modeling of Self-Interstitial Diffusion in Implanted Molecular Beam Epitaxy Silicon salvador, D. De, Mattoni, A., Napolitani, E., Drigo, A.V., Mirabella, S., Priolo, F. Materials Research Society	8 Conference Proceedings Indirect Diffusion Mechanism of Boron Atoms in Crystalline and Amorphous Silicon Salvo Mirabella, Davide De Salvador, Enrico Napolitani, Elena Bruno, Giuliana Impellizzeri, Gabriele Bisognin, Emanuele … Materials Research Society
3 Conference Proceedings Lattice Strain and Composition of Boron-Interstitial Clusters in Crystalline Silicon Salvador, D.De, Bisognin, G., Napolitani, E., Aldegheri, L., Drigo, A.V., Carnera, A., Mirabella, S., Bruno, E., … Materials Research Society	9 Conference Proceedings Silicon Self-Interstitial Clusters Colombo, L., Bongiorno, A., Rosati, M. MRS - Materials Research Society
4 Conference Proceedings Silicon Interstitial Driven Loss of Substitutional Carbon from SiGeC Structures Carroll, M.S., Sturm, J.C., Napolitani, E., Salvador, D. De, Berti, M., Stangl, J., Bauer, G., Tweet, D.J. Materials Research Society	10 Conference Proceedings Suppression of Boron Diffusion by Fluorine Implantation in Preamorphized Silicon Impellizzeri, Giuliana, Santos, Jose H.R.dos, Mirabella, Salvatore, Priolo, Francesco, Napolitani, Enrico, Carnera, … Materials Research Society
5 Conference Proceedings Carbon Diffusion and Clustering in SiGeC Layers Under Thermal Oxidation Salvador, D. De, Napolitani, E., Coati, A., Berti, M., Drigo, A.V., Carroll, M., Sturm, J.C., Stangl, J., Bauer, G., … Materials Research Society	11 Conference Proceedings Heteroepitaxial Growth of 3C-SiC on Silicon-Porous Silicon-Silicon (SPS) Substrates F. La Via, A. Severino, G. D'Arrigo, S. Leone, M. Mauceri, G. Abbondanza, A. Terrasi Electrochemical Society
6 Conference Proceedings Silicon Self-Interstitial Cluster Formation And Dissolution In Soi Saavedra, A., Frazer, J., Wrigley, D., Jones, K., Berti, M., Avci, I., Earles, S., Law, M., Jones, E. Materials Research Society	12 Conference Proceedings The Source Of Transient Enhanced Diffusion In Sub-KeV Implanted Boron In Crystalline Silicon Napolitani, Enrico, Carnera, A., Privitera, V., Schroer, E., Marmino, G., Priolo, F., Moffatt, S. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12