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The Local Structure Of Antimony In High Dose Antimony Implants In Silicon By XAFS And Sims

Author(s):
Sahiner, M. Alper
Novak, Steven W.
Woicik, Joe C.
Takamura, Yayoi
Griffin, Peter B.
Plummer, James D.
1 more
Publication title:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
717
Pub. date:
2002
Page(from):
121
Page(to):
128
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996533 [1558996532]
Language:
English
Call no.:
M23500/717
Type:
Conference Proceedings

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