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The Effect of Ge Content in MBE Si_(1-x)Ge_x on the Evolution of 311 Defects

Author(s):
Crosby, Robert
Frazer, Jackie
Jones, K.S.
Law, M.E.
Larsen, A. Nylandsted
Hansen, J. Lundsgaard
1 more
Publication title:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
717
Pub. date:
2002
Page(from):
27
Page(to):
32
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996533 [1558996532]
Language:
English
Call no.:
M23500/717
Type:
Conference Proceedings

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