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A Correlation Study Of Thermal Stability On Porous Low-K

Author(s):
Chow, Y.F.
Foo, T.H.
Shen, L.
Pan, J.S.
Du, A. Y.
Xing, Z.X.
Yuan, Y.J.
Li, C.Y.
Kumar, R.
Foo, P.D.
5 more
Publication title:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
716
Pub. date:
2002
Page(from):
563
Page(to):
568
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996526 [1558996524]
Language:
English
Call no.:
M23500/716
Type:
Conference Proceedings

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