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Control Of A Metal-Electrode Work-Function By Solid-State Diffusion Of Nitrogen

Author(s):
Lander, R.J.P.
Hooker, J.C.
Zijl, J.P. van
Roozeboom, F.
Maas, M.P.M.
Tamminga, Y.
Wolters, R.A.M.
2 more
Publication title:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
716
Pub. Year:
2002
Page(from):
253
Page(to):
260
Pages:
8
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996526 [1558996524]
Language:
English
Call no.:
M23500/716
Type:
Conference Proceedings

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