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Gas Phase Chemistry Study During Deposition Of Amorphous And Microcrystalline Silicon Films By HWCVD Using Quadrupole Mass Spectrometry

Author(s):
Publication title:
Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
715
Pub. date:
2002
Page(from):
171
Page(to):
178
Pages:
8
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996519 [1558996516]
Language:
English
Call no.:
M23500/715
Type:
Conference Proceedings

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