Blank Cover Image

Effect of Filament Material on the Decomposition of SiH4 in Hot Wire CVD of Si-Based Films

Author(s):
Publication title:
Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
715
Pub. date:
2002
Page(from):
21
Page(to):
30
Pages:
10
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996519 [1558996516]
Language:
English
Call no.:
M23500/715
Type:
Conference Proceedings

Similar Items:

Duan, H.L., Zaharias, G.A., Bent, Stacey F.

Materials Research Society

GoddardIII, W. A., Goodwin, D. G., Holt, J. K., Muller, R. P.

Materials Research Society

Zaharias, Gillian A., Shi, Helen H., Bent, Stacey F.

Materials Research Society

Polini,R., Barbarossa,V., Minarini,C., Eray,A., Marucci,A., Mattei,G.

Trans Tech Publications

Schropp, R.E.I., Xu, Y., Iwaniczko, E., Zaharias, G.A., Mahan, A.H.

Materials Research Society

T. Zhang, J.G. Zhang, B. Shen, F.H. Sun

Trans Tech Publications

Dillon, A.C., Gedvillas, L., Williamson, D.L., Thiesen, J., Perkins, J.D., Mahan, A.H.

Materials Research Society

Rath, J. K., Tichelaar, F. D., Meiling, H., Schropp, R. E. I.

MRS - Materials Research Society

Zaharias, G.A., Mahan, A.H., Schropp, R.E.I., Xu, Y., Williamson, D.L., Al-Jassim, M.M., Romero, M.J., Gedvilas, L.M.

Materials Research Society

Ferreira, I., Aguas, H., Mendes, L., Fernandes, F., Fortunato, E., Martins, R.

MRS - Materials Research Society

Habuchi, H., Han, D., Iwaniczko, E., Lin, J., Wang, Q., Yue, G.

Materials Research Society

Duan, H. L., Bent, S. F.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12