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Resistless Patterning of Magnetic Storage Media Using Ion Projection Structuring

Author(s):
Dietzel, A.
Berger, R.
Grimm, H.
Schug, C.
Bruenger, W.H.
Dzionk, C.
Letzkus, F.
Springer, R.
Loeschner, H.
Platzgummer, E.
Stengl, G .
Anders, S.
Bandic, Z.Z.
Rettner, C.T.
Terris, B.D.
Eichhorn, H.
Boehm, M.
Adam, D.
13 more
Publication title:
Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
705
Pub. Year:
2002
Page(from):
279
Page(to):
290
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996410 [1558996419]
Language:
English
Call no.:
M23500/705
Type:
Conference Proceedings

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