Sol-Gel Processing of Low Dielectric Constant Nanoporous Silica Thin Films

Sol-Gel Processing of Low Dielectric Constant Nanoporous Silica Thin Films

Author(s):

Publication title:

Nanophase and nanocomposite materials IV : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

703

Pub. Year:

2002

Page(from):

147

Page(to):

152

Pages:

6

Pub. info.:

Wrrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996397 [1558996397]

Language:

English

Call no.:

M23500/703

Type:

Conference Proceedings

Details

TDL ID:	ZA00014577
Series ID:	PA00000011
Conf. info. (Name):	Symposium on nanophase and nanocomposite materials
Conf. info. (Number):	4th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.26-2001.11.29

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