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Development of Scanning Microwave Microscope for High-Throughput Characterization of Combinatorial Dielectric Thin Film

Author(s):
Okazaki, Noriaki
Ahmet, Parhat
Chikyow, Toyohiro
Odagawa, Hiroyuki
Cho, Yasuo
Fukumura, Tomoteru
Kawasaki, Masashi
Ohtani, Makoto
Koinuma, Hideomi
Hasegawa, Tetsuya
5 more
Publication title:
Combinatorial and artificial intelligence methods in materials science : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
700
Pub. date:
2002
Page(from):
119
Page(to):
124
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996366 [1558996362]
Language:
English
Call no.:
M23500/700
Type:
Conference Proceedings

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