Development of Scanning Microwave Microscope for High-Throughput Characterization of Combinatorial Dielectric Thin Film | 東京工業大学附属図書館文献データベース

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Development of Scanning Microwave Microscope for High-Throughput Characterization of Combinatorial Dielectric Thin Film

Author(s):

Okazaki, Noriaki

Chikyow, Toyohiro

Odagawa, Hiroyuki

Fukumura, Tomoteru

Kawasaki, Masashi

Koinuma, Hideomi

Hasegawa, Tetsuya

Publication title:

Combinatorial and artificial intelligence methods in materials science : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

700

Pub. Year:

2002

Page(from):

119

Page(to):

124

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996366 [1558996362]

Language:

English

Call no.:

M23500/700

Type:

Conference Proceedings

Details

TDL ID:	ZA00014575
Series ID:	PA00000011
Conf. info. (Name):	Symposium on combinatorial and artificial intelligence methods in materials science
Conf. info. (Number):	2001
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.26-2001.11.29

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